Scanning Electron Beam microscopy is required for imaging semiconductors where the geometry can be sub-optical. Our FEI Sirion is a state of the art SEM. It's customised Zigzag and Stitch software produces whole area images often with more than 10,000 'tiles' per layer and resolutions below 5 nanometers.
Preliminary SEM imaging can be a useful evaluation tool and our Hitachi SEM offers a convenient way for our engineers to plan larger image capture schedules.
